Flat surface processing is processing that grinds the flat surface of the target object. The main purpose of this processing is making the thickness of the target object uniform or achieving the required flatness. Additionally, processing to achieve uniform flatness on multiple locations of a target object is called common flat surface processing.
No laser processing machine until now has been able to perform flat surface processing, but Nikon’s optical subtractive processing machine enables high precision surface processing through precise control using precision measuring equipment, the laser and the stage. Furthermore, regarding problems such as deformation or breakages caused by stress or resistance generated by machine tools, this machine does not generate any thermal stress or contact resistance because it performs ablation processing with an ultra-short pulse laser, thus expanding the possibilities of high precision surface processing on parts that were previously difficult to machine.

Nikon’s optical subtractive processing machine utilizes the merits of the ultra-short pulse laser that does not cause heat damage on the target object and the high precision global coordinate system to enable flat surface processing on parts that are difficult to flatten such as thin plates.

Next is an example of common flat surface processing performed on a thin stainless steel plate.

As conventional machine processing is contact type, force and heat are generated at the part being machined because processing is performed by pressing a tool such as a cutting tool onto it. Furthermore, stress is generated on the part being machined because tools for fixing the workpiece in place such as jigs are needed to suppress the reaction force of the cutting tool, so it was difficult to perform fine processing on low rigidity parts with long thin protrusions. Nikon’s laser processing is non-contact processing using an ultra-short pulse laser that can perform processing of low rigidity parts, which is sensitive to stress, at a sub-micron level.